General Information
The Hitachi S5000 is an In-Lens Cold-Field Emission SEM, used for High Resolution Scanning Electron Microscopy. A cold cathode field emission (CCFE) source is some three orders of magnitude brighter than the standard thermionic tungsten emitter. The higher brightness and reduced electron optic aberrations associated with CCFE improves resolution and signal to noise ratio throughout the accelerating voltage range. CCFE sources have low energy spread and smaller source size to give high resolution at lower accelerating voltage, and higher current density for superior image quality under all conditions. The S-5000 features:

1. Ultra-high resolution of 3nm at 1.0 KV, 0.6 nm at 30 KV with secondary electron images.
2. Secondary electron, EDS and STEM detectors.
   
3. Digital image capture.
4. Software packages for qualitative and quantities mapping.
5. Operating voltage ranges from 0.5 to 30 KV.
6. Magnification range of 250~1,000,000x (High magnification mode) and 30~500x (Low magnification mode).
7. Load lock for small sized samples.

System Specifications
Resolution:
0.6 nm (at accelerating voltage 30kV)
3.0 nm (at accelerating voltage 1kV, in HIGH-Z mode)

Magnification:
x30 to x500 (low magnification mode)
x250 to x800,000 (high magnification mode)

Max sample size 9.5mm x 5mm x 2.4mm (with standard sample holder)
Max sample size 20mm x 6mm x 2.4mm (with standard sample holder)

Electron Gun:
Cold-cathode Field Emissions Electron Gun with mounted battler type electrostatic lens and anode heater
Accelerating Voltage 0.5 to 30 kV (variable in 0.1kV steps)

Lens: 3 stage electromagnetic lens reduction system
Stigmatall: 8 pole electromagnetic method (X and Y)

Deflection coil: 2 stage electromagnetic deflection method
Objective lens aperature: variable aperature
Sample change: air lock
Detector: secondary electron detector

Contact Information
For additional information about the Hitachi S-5000 FESEM, please contact Geoff Goold at gg2332@columbia.edu.