Equipment Name | Status | Notes |
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Angstrom EvoVac Deposition System |
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Bal-Tec Critical Point Dryer |
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Cambridge Nano Tech ALD |
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Cressington Manual Sputter Coater |
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Dektak 3 Profilometer |
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Diener Plasma Etch System |
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Edwards Thermal Evaporator #1 |
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Edwards Thermal Evaporator #2 |
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FEI E-Beam Writer |
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Filmetrics (Thin Film Measurements) |
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Heidelberg Laser Writer (1 micron) |
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Heidelberg Laser Writer (3 micron) |
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Hitachi S5000 FESEM |
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Kulicke & Soffa Die Slicer |
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Laurell Photoresist Spin Coaters |
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Nanonex Imprinter |
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Nanonex Ultra-100 MVD |
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Nikon Eclipse Microscope |
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Oxford PlasmaLab 80 Plus ICP |
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Semicore E-Beam Evaporator |
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Suss MicroTec MA6 Mask Aligner |
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Suss MicroTec MJB3 Mask Aligner |
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Technics Series 800 Micro RIE |
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UVOCs |
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Westbond 7476D Al Wire Bonder |
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Westbond 7477E Au Wire Bonder |
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WyKo NT9100 Optical Profiler |
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YES Yield III Oven |
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Oxford PlasmaPro NPG80 PECVD |
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Agilent SEM |
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