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Columbia University Clean Room
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Equipment Status:

Equipment Name Status Comments

Edwards BOC/Auto 306

Up

Cressington Manual Sputter Coater

Up

Oxford PlasmaPro NPG80 PECVD

Up

Semicore 2000

Up

Angstrom EvoVac Deposition System

Up

* Users might see flactuations in the pressure while rotating the crucibles.

E-beam: Au,Cr,Ti,Pd,AuPd

Thermal: Cr,Al

Sputter: Nb,Al:Si

Next PM:Dec-1

ALD

Up

Oxford PlasmaLab 80+ (ICP)

Up

Technics Series 800 (RIE)

Up

Diener Plasma Etch System

Up

Dektak 3

Up

Spinner1 

Up

Spinner2

Up

Spinner3

Up

Westbond 7477 E

Up

Westbond 7476 D

Up

Bal-Tec Critical Point Dryer

Up

Heidelberg Laser writer 1 micron

Up

Heidelberg Laser writer 3 micron

Up

FEI

Up

Suss MicroTec MA6

Up

Nikon Eclipse

Up

Wyko NT9100

Up

Agilent SEM

Down

UVOCs

Up

Nanonex Imprinter

Up

Hot plates

Up

Kulicke&Soffa Die Slicer

Up