The CEPSR (Center for Engineering and Physical Science Research) Clean Room is dedicated to providing the instrumentation, technical expertise, and team-teaching environment to stimulate collaborative research in nanoscale technology. The facility supports the creation and evaluation of devices and materials with state of the art fabrication.
The Clean Room is a multidisciplinary laboratory that supports research across many different departments within Columbia University. The laboratory supports not only materials and device research in physics, electrical engineering, applied physics, mechanical engineering and chemistry, but it also facilitates research interaction and collaboration between the physical, chemical, biological and medical disciplines.
This cooperative research and teaching laboratory is open to Columbia University researchers at all levels with the concurrence of the cleanroom committee. The facility represents a strategic capability for the Nanoscale Science and Technology research on the Columbia Campus.
The CEPSR Clean Room began operation in 2000 and occupies 3000 square feet of space. It is divided into 5 separate bays (each dedicated to a specific processing application) with two Yellow Rooms, where all the optical lithography and wet chemical processing is performed. Lithographic capabilities include micron-scale features down to less than 50 nanometers using electron beam lithography. The laboratory also includes facilities for thermal evaporation, electron beam evaporation, sputtering, reactive ion etching, and chemical vapor deposition.